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METHOD OF ARRANGING PRINTING ASSIST FEATURES IN MASK LAYOUT, SYSTEM FOR GENERATING THE PRINTING ASSIST FEATURES, AND PROGRAM
METHOD OF ARRANGING PRINTING ASSIST FEATURES IN MASK LAYOUT, SYSTEM FOR GENERATING THE PRINTING ASSIST FEATURES, AND PROGRAM
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机译:在掩码布局中安排打印辅助功能的方法,生成打印辅助功能的系统和程序
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摘要
PROBLEM TO BE SOLVED: To provide a method of arranging printing assist features in a mask layout.;SOLUTION: The method includes the steps of providing a design layout having one or a plurality of design feature(s), generating a set of parameters relating to one or a plurality of printing assist feature(s) (PrAF), adding the PrAFs relating to the set of parameters to the design layout to change the design layout, executing simulation of the changed one or the plurality of design feature(s), verifying whether the PrAF is removable based on a result of simulation, and generating a set of PrAF arrangement rules based on the set of parameters when the PrAF is verified to be removable. A final set of PrAFs used in a mask layout can be generated using the PrAF arrangement rule.;COPYRIGHT: (C)2010,JPO&INPIT
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