Method of placing a printing assist features in the mask layout , a system for producing a printing assist features , and a program

摘要

PROBLEM TO BE SOLVED: To provide a method of arranging printing assist features in a mask layout.;SOLUTION: The method includes the steps of providing a design layout having one or a plurality of design feature(s), generating a set of parameters relating to one or a plurality of printing assist feature(s) (PrAF), adding the PrAFs relating to the set of parameters to the design layout to change the design layout, executing simulation of the changed one or the plurality of design feature(s), verifying whether the PrAF is removable based on a result of simulation, and generating a set of PrAF arrangement rules based on the set of parameters when the PrAF is verified to be removable. A final set of PrAFs used in a mask layout can be generated using the PrAF arrangement rule.;COPYRIGHT: (C)2010,JPO&INPIT