DIFFRACTION EFFICIENCY MEASURING DEVICE AND DIFFRACTION EFFICIENCY MEASURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an efficiency measuring device and a method for regulating a groove direction of a diffraction grating, by which the groove direction of the diffraction grating can be regulated readily and precisely.;SOLUTION: This efficiency measuring device 1 includes a light source 10, a spectroscope 12 arranged on an optical path thereof, a holder 18 for holding a slit 14 arranged on the optical path of the spectroscope 12, a diffraction grating 16 as a measuring target, and the like, a detector 20 for detecting a light intensity (energy) of a diffraction light from the diffraction grating 16, and a target member 22 arranged on an optically conjugated position to a light incident position of the detector 20. When regulating the groove direction of the diffraction grating 16, a strip-shaped diffraction light from the diffraction grating 16 obtained by making a zero-order diffraction light from the diffraction grating spectroscope 12 incident on the diffraction grating 16, is made incident on the target member 22. At that time, by regulating the attitude of the diffraction grating 16 so as to make the strip-shaped diffraction light to be superimposed on a groove direction regulating mark of the target member 22, the groove direction of the diffraction grating 16 is regulated to be vertical.;COPYRIGHT: (C)2010,JPO&INPIT