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PIEZOELECTRIC VIBRATION PIECE, PIEZOELECTRIC VIBRATOR USING PIEZOELECTRIC VIBRATION PIECE, AND PIEZOELECTRIC DEVICE USING PIEZOELECTRIC VIBRATION PIECE
PIEZOELECTRIC VIBRATION PIECE, PIEZOELECTRIC VIBRATOR USING PIEZOELECTRIC VIBRATION PIECE, AND PIEZOELECTRIC DEVICE USING PIEZOELECTRIC VIBRATION PIECE
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机译:压电振动片,使用压电振动片的压电振动器以及使用压电振动片的压电装置
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摘要
PROBLEM TO BE SOLVED: To perform total inspection about the quality of electrical connection and fixing, especially the quality of the fixing after fixing an electrode of a piezoelectric vibration piece or a piezoelectric substrate to a package and establishing electrical connection between the electrode of the piezoelectric vibration piece and a pad of the package.;SOLUTION: Since the total inspection is executed by a nondestructive test that looks through a mount electrode 4 from a rear surface (or a front surface) of a crystal substrate 2 when the mount electrode 4 is formed on the front surface (or the rear surface) of the crystal substrate 2, it is possible to confirm the state of an exposure part 42 of the mount electrode 4. Consequently, this can prevent the occurrence of a failure caused by the execution of a sampling destructive test, that is, deterioration in yield from being brought about.;COPYRIGHT: (C)2010,JPO&INPIT
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