RELATIVE PRESSURE SENSOR, RELATIVE PRESSURE MEASURING DEVICE, AND RELATIVE PRESSURE MEASURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a relative pressure sensor that can determine positive pressure or negative pressure, has a high static pressure characteristic, and offsets the frequency temperature characteristic of a double tuning-fork piezoelectric vibrating element.;SOLUTION: This relative pressure sensor includes a first case section 7 having openings on the upside and downside, first and second diaphragm sections 10a and 10b that seal the upper and lower openings of the first case section 7, form a sealed space 23 inside, and has, from the outer side to the central part, a first joint 11a (second joint 11b), a thin section 13a (13b), a first holding section 12a (second holding section 12b), and a first central plate 14a (second central plate 14b), first and second double tuning-fork vibrating pieces 15a and 15b mounted on the first and second holding sections 12a and 12b of the first and second diaphragm sections 10a and 10b, and a second case section 25 that isolates the first and second diaphragm sections airtightly, covers the first case section 7, and has first and second inlets 27a and 27b.;COPYRIGHT: (C)2011,JPO&INPIT