METHOD OF ANALYZING THREE-DIMENSIONAL ATOM PROBE STRUCTURE DATA

摘要

PROBLEM TO BE SOLVED: To three-dimensionally search for a structure while complementing it with missing atoms by a simple method not requiring a large resource complicated in processing, as to a method of analyzing three-dimensional atom probe structure data.;SOLUTION: Based on an interatomic distance according to atomic level fine structure data on a specimen acquired by using a three-dimensional atom probe, the positions of atoms missing from the fine structure of an actual specimen are found without using reference data to complement it with atoms to the positions.;COPYRIGHT: (C)2011,JPO&INPIT