DEGASSING DEVICE OF VACUUM TREATMENT APPARATUS, DEGASSING METHOD OF VACUUM TREATMENT APPARATUS, AND VACUUM TREATMENT APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a degassing device of a vacuum treatment apparatus capable of properly performing degassing treatment, a degassing method of the vacuum treatment apparatus, and the vacuum treatment apparatus.;SOLUTION: The degassing device of the vacuum treatment apparatus 1 which is assembled in the vacuum treatment apparatus 1 having a vacuum chamber 2 treating a work piece W connected to a vacuum suction device 31 through a vacuum piping 32, and which removes absorbed gas absorbed on to the inside of the vacuum treatment apparatus 1, cooperating with the vacuum suction device 31 is provided with: a heated gas supplying device 12 communicating with a carrier gas source 16 of a carrier gas for removing the absorbed gas, and heating the carrier gas to supply to the vacuum chamber 2; and a gas cooling device 33 provided through the vacuum piping 32 in the vicinity of the upstream side of the vacuum suction device 31, and cooling the carrier gas sucked by the vacuum suction device 31.;COPYRIGHT: (C)2010,JPO&INPIT