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COMPOSITION OF COLOR FILTER POLISHING PAD, THE COLOR FILTER POLISHING PAD, AND METHOD OF POLISHING COLOR FILTER
COMPOSITION OF COLOR FILTER POLISHING PAD, THE COLOR FILTER POLISHING PAD, AND METHOD OF POLISHING COLOR FILTER
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机译:彩色滤光片抛光垫的组成,彩色滤光片抛光垫和彩色滤光片的抛光方法
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摘要
PROBLEM TO BE SOLVED: To provide a color filter polishing pad capable of stably removing foreign matter or protrusions occurring on a filter at a high polishing rate during a color filter manufacturing step and also obtaining high quality of a polished surface, and a method of polishing a color filter using the color filter polishing pad.;SOLUTION: The problem is solved first by a composition for forming the color filter polishing pad containing (A) polyurethane having a carbon-carbon double bond and (B) a crosslinking agent. The (A) polyurethane further includes one or more selected from a vinyl group (CH2=CH-) and an allyl group (CH2=CH-CH2-) in a side chain.;COPYRIGHT: (C)2010,JPO&INPIT
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