LIQUID-DROPLET EJECTING HEAD, LIQUID-DROPLET EJECTING APPARATUS, METHOD OF MANUFACTURING THE LIQUID-DROPLET EJECTING HEAD, AND METHOD OF MANUFACTURING THE LIQUID-DROPLET EJECTING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a liquid-droplet ejecting head or the like excellent in dielectric strength.;SOLUTION: The liquid droplet ejecting head has at least a second substrate 2 in which electrodes A are formed on a plurality of gap steps 20, respectively, and a first substrate 1 which has a plurality of ejection chambers 13 the wall surfaces of which are partly comprised of diaphragms 12 and in which insulating films 15 are formed on a surface of a side opposite to the ejection chambers of the diaphragms 12. The diaphragm 12 and the insulating film 15 are opposed via a gap G to the electrodes A. The liquid droplet ejecting head has electrode extraction portions 29 which extract the electrodes A from the gap steps 20. An insulating protecting film 25 with a tolerance to etching is formed in the vicinity of the electrode extraction portion 29 of the gap step 20. The insulating protecting film 25 is formed in the vicinity of an end of a lead 22 of the electrode A.;COPYRIGHT: (C)2010,JPO&INPIT