ELECTROSTATIC ACTUATOR, LIQUID-DROPLET EJECTING HEAD, LIQUID-DROPLET EJECTING DEVICE AND MANUFACTURING METHOD OF LIQUID-DROPLET EJECTING HEAD

摘要

PROBLEM TO BE SOLVED: To provide an electrostatic actuator and a liquid-droplet ejecting head, each equipped with a drive circuit including a switching element, achieving reduction in size and cost , and simplification of circuit configuration, and also to provide a liquid-droplet ejecting device and a manufacturing method of the liquid-droplet ejecting head.;SOLUTION: The liquid-droplet ejecting head 100 includes: a cavity substrate 3 whose bottom wall is formed into a vibration plate 7, and with an ink pressure chamber 5 for storing and ejecting the droplets; an electrode glass substrate 4 facing the vibration plate 7 while interposing a gap 18, and equipped with a fixed electrode 6 for driving the vibration plate 7; and a nozzle substrate 2 with nozzle holes 15 for ejecting the droplets sent from respective ink pressure chambers 5. A MOS-FET as the switching element for controlling a drive voltage to be supplied between the vibration plate 7 and the fixed electrode 6 is formed on the cavity substrate 3, and the vibration plate 7 is constituted of drain terminals constituting the MOS-FET.;COPYRIGHT: (C)2009,JPO&INPIT