NEEDLE MARK INSPECTOR, PROBE DEVICE, AND NEEDLE MARK INSPECTION METHOD AND MEMORY MEDIUM

摘要

PPROBLEM TO BE SOLVED: To provide a needle mark inspector capable of automatically and precisely inspecting the state of exposure of an under layer of an electrode pad with respect to a substrate after subjected to inspection; a probe device provided with the inspector; a method of inspecting needle marks; and a memory medium having a program for executing the inspection method stored therein. PSOLUTION: The needle mark inspector includes: a needle mark region extraction portion 50 for extracting a needle mark region 13 from imaged data D1 obtained from an upper camera 72 for imaging an electrode pad 2; a gray level data acquisition portion 51 for acquiring a gray pattern in which the position of a pixel on a central line P extending longitudinally in the needle mark region is made corresponding to a gray level of the pixel with respect to the needle mark region 13; and a mark depth determination section 53 for determining whether the underlayer 6 is exposed or not based on the acquired gray pattern and a standard pattern determined when the underlayer 6 is exposed from the needle mark 10. PCOPYRIGHT: (C)2010,JPO&INPIT