PROBLEM TO BE SOLVED: To provide a silicon nozzle substrate or the like capable of achieving high rigidity and a high droplet discharge speed, securing a sufficient ink discharge amount, and reducing the number of steps during manufacturing.;SOLUTION: The silicon nozzle substrate 1 has a plurality of nozzle holes for discharging droplets. Each nozzle hole 11 is composed of a plurality of cylindrical parts 11a to 11i, and sectional areas of the cylindrical parts 11a to 11i vertical to an axial direction is constant from a top surface to a bottom surface. Sectional shapes and sectional areas vertical to the axial direction are equal. The cylindrical parts 11a to 11i have diameters of 10 to 40 m, and lengths of 30 to 100 m. The cylindrical parts 11a to 11i are cylindrical, and can be arranged on the center and its concentric circle. The cylindrical parts may be polygonal-cylindrical, and can be arranged on the center and its concentric circle. A section may be regular-hexagonal, and disposed into a honeycomb structure.;COPYRIGHT: (C)2010,JPO&INPIT
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