GAS MONITORING DEVICE, COMBUSTION STATE MONITORING DEVICE, AGING MONITORING DEVICE, AND IMPURITY CONCENTRATION MONITORING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a gas monitoring device or the like reducing a dark current without a cooling mechanism, and monitoring gas with high sensitivity by using an InP-based photodiode wherein light reception sensitivity is enhanced to a wavelength of 1.8 μm or more.;SOLUTION: A light receiving layer 3 includes a multiple quantum well structure of a group III-V semiconductor, and a pn-junction 15 is formed by selective diffusion of an impurity element into the light receiving layer, and an impurity concentration in the light receiving layer is below 5×10¹⁶ /cm³. This gas monitoring device receives light having at least one wavelength which is the wavelength of 3 μm or shorter, and detects a gas component or the like in the gas.;COPYRIGHT: (C)2010,JPO&INPIT