ELECTROSTATIC TYPE MICROMIRROR DRIVE SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide an electrostatic type micromirror drive system in which the resonance period of an micromirror is continuously measured without complicating a circuit configuration.;SOLUTION: The electrostatic type micromirror drive system has a micromirror driven by electrostatic force. The electrostatic type micromirror drive system has a power source part which supplies electric power to the micromirror, corresponding to a pulse having a period Ts for measurement which is shorter than the period T for driving the micromirror. The electrostatic type micromirror drive system has a measurement part which measures the electric current value of the electric current flowing in the micromirror on the basis of the pulse. The relation of the mean value of the input voltage to the micromirror and time based on the pulse is shown by a wave form having the period T for driving. The period T for driving is decided according to the driving state of the micromirror based on the value of the electric current.;COPYRIGHT: (C)2010,JPO&INPIT