DEFECT DETECTOR, DEFECT DETECTION SYSTEM USING THE SAME, AND DEFECT DETECTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a defect detector suitable for detecting a defect, such as a void on the bonded interface of transparent substrates composed of a compound semiconductor, which are bonded directly, and a defect detection system capable of surely removing the defect portion in a chip appearance inspection after chip process completion and a defect detection method.;SOLUTION: The defect detector for detecting a defect on a compound semiconductor substrate includes at least a ring-like stage with an inside diameter smaller than that of the compound semiconductor substrate, for mounting the compound semiconductor substrate; a lighting unit located so that light is obliquely entered from at least two directions to the compound semiconductor substrate on the stage; and an area sensor located on the upper side of the compound semiconductor substrate, for detecting light scattered from the defect.;COPYRIGHT: (C)2010,JPO&INPIT