The high purity polycrystal silicon granulations and its manufacturing method and its use null density of dust non- containing and

摘要

PROBLEM TO BE SOLVED: To provide a polycrystalline granulated silicon which does not have the drawbacks of the known granulated polysilicon.;SOLUTION: The polycrystalline granulated silicon is made of particles which have a density of greater than 99.9% of the theoretical solid density and therefore have a pore content of less than 0.1% and have a surface roughness R_a of less than 150 nm.;COPYRIGHT: (C)2005,JPO&NCIPI