Defect detection apparatus, a defect detection method, defect detection program, and computer-readable recording medium storing the program

摘要

PROBLEM TO BE SOLVED: To detect a defect with high precision by suppressing the occurrence of a false defect.;SOLUTION: A defect detecting apparatus 1 includes a first difference operating circuit 23a for calculating the differences between the brightness values (P1-P8) of the respective comparing target pixels contained in a comparing target pixel group and the brightness value (P0) of an inspection target pixel, a second difference operating circuit 23b for calculating the differences between the brightness values (P1'-P8') of the respective comparing target pixels contained in the comparing target pixel group and the brightness value (P0) of the inspection target pixel, a comparing/selecting circuit 24 for selecting the difference smallest in absolute value among the calculated differences as a defect detecting index, and a defect decision part 13 for determining the presence of the defect at the position corresponding to the inspection target pixel of an inspection target from the magnitude relationship of the defect detecting index selected by the comparing/selecting circuit 24 with a predetermined threshold. Accordingly, the defect can be detected with high precision by suppressing the occurrence of the false defect.;COPYRIGHT: (C)2010,JPO&INPIT