The fluorine dope SnO 2 surface as conductivity control law,

摘要

PROBLEM TO BE SOLVED: To establish a manufacturing method of a highly efficient wave absorbing glass device having a transparent conductive material as a base, by controlling conductivity in the surface or the inside of the transparent conductive material, position-selectively or space-selectively.;SOLUTION: A mask 4 is disposed on the surface of a SnO₂:F film 2 used as a transparent conductive material on a substrate 1. An entrance window 6 made of synthetic quartz is in close contact with the mask 4 and disposed on it, and water 5 used as a compound containing hydrogen is formed like a layer in an opening part 4a held between the substrate 1 and the entrance window 6 made of synthetic quartz. A laser beam 3 is irradiated on the surface of the transparent conductive SnO₂:F film 2 through the entrance window 6 made of synthetic quartz and water 5, and the conductivity of the portion of the film 2 which has received the irradiation changes.;COPYRIGHT: (C)2008,JPO&INPIT