Ejection performance method for maintaining nozzle liquid droplet ejection apparatus, the droplet ejection apparatus, method of manufacturing an electro-optic device

摘要

PROBLEM TO BE SOLVED: To provide a liquid drop delivery apparatus capable of enhancing drawing quality by eliminating nozzle clogging of a head by leaving no bubble in a body for sealing a nozzle surface, a delivery performance maintaining method of a nozzle in a liquid drop delivery apparatus, a production method for an electric optical apparatus, an electric optical apparatus and an electronic equipment.;SOLUTION: The liquid drop delivery apparatus 10 for delivering a delivery liquid to a work from nozzles 81-86 of the head 11 has the body 221 for sealing the nozzle surface 70 of the head 11; and a liquid filling part 410 for delivery for raising a pressure of the delivery liquid in the nozzles 81-86 and filling the inside of the nozzles 81-86 by the delivery liquid in the state before a filling liquid M is filled in the body 221 and the nozzle surface 70 is sealed by the body 221.;COPYRIGHT: (C)2006,JPO&NCIPI