Single crystal magnesium oxide sintered body and a method of manufacturing the same, and protective film for plasma display panel

摘要

PROBLEM TO BE SOLVED: To provide such a single crystal MgO sintered compact for using as a target material for film-forming an MgO film on a substrate by using an electron beam deposition method as improves excellent film characteristics, for example, an electric discharge property at the time of using as a protective film for use in a PDP without reducing the density and sputtering resistance of the MgO film obtained, and to provide a manufacturing method of the single crystal MgO sintered compact, and a protective film for use in PDPs which is obtained as a target material of this single crystal MgO sintered compact.;SOLUTION: The single crystal magnesium oxide sintered compact is characterized by containing 0.03-3.5 mole%, relative to magnesium, of at least one kind of Si, Al, Fe and Y; and the protective film for use in a plasma display panel, using this single crystal magnesium oxide sintered compact as a target material, is manufactured by an electron beam deposition method, an ion radiation deposition method or a sputtering method.;COPYRIGHT: (C)2006,JPO&NCIPI