The tester itself which internalizes the tester device, the survey instrument and the relay substrate storage

摘要

PROBLEM TO BE SOLVED: To provide a tester unit and an inspection device capable of carrying out easily replacement work or the like for a repeating substrate connected to a tester, while shortening an optical path from a light source to an inspected object, and a repeating substrate storage unit used therefor.;SOLUTION: This tester unit 1 has a tester main body 10 built-in with the tester, the repeating substrate storage unit 20 fixed to the tester main body 10, and the light source 30. The repeating substrate storage unit 20 includes the first and second repeating substrates 62, 64 connected electrically to the tester inside the tester main body 10, and a contact part 90 for connecting the second repeating substrate 64 electrically to an external probe 102. A notch part 64A for the optical path is provided in the second repeating substrate 64. The notch part 64A for the optical path of the second repeating substrate 64 is supported in a position projected from a side part of the tester main body 10, in the repeating substrate storage unit 20. The light source 30 is moved to an inspection point A opposed to the notch part 64A for the optical path of the second repeating substrate 64, and to an evacuation point B non-opposed to the second repeating substrate 64.;COPYRIGHT: (C)2005,JPO&NCIPI