Bubble method for removing the coating apparatus and coating apparatus of the solution

摘要

PROBLEM TO BE SOLVED: To provide a coating device capable of carrying out foam removal of a feed pipe, a head and a recovery pipe without flowing a solution from a nozzle.;SOLUTION: The coating device for a solution for spraying/coating the solution onto a base plate is provided with the head 7 having the nozzle 14 for spraying the solution by an ink jet method; a solution tank 31 for the solution; the feed pipe 21 for connecting the solution tank and the head and feeding the solution of a feed source to the head; the recovery pipe 23 for recovering the solution fed from the feed pipe to the head; and a press member 55 for closing the nozzle of the head when the solution is fed to the head to flow to the recovery pipe for covering.;COPYRIGHT: (C)2004,JPO&NCIPI