Coating apparatus and bubble removing method in coating apparatus

摘要

PROBLEM TO BE SOLVED: To provide coating equipment which can shorten the time required for bubble removal.SOLUTION: Coating equipment, which stores a coating liquid supplied from a supply tank 20 through a first liquid passage Cin, has a coating head 10 for jetting coating liquid in a mist form out of a plurality of nozzles 13, and coats the surface of a coating object body with the coating liquid jetted out of the plurality of nozzles 13 of the coating head 10, has a configuration including an immersion vat 61 for storing a diluent of the coating liquid, a first on-off valve 41 for fluctuating the pressure of the coating liquid in the first liquid passage Cin which is directed to the coating head 10, and a control unit for actuating the first on-off valve 41 in a state that the coating head 10 is so disposed that the plurality of nozzles 13 may be immersed in the diluent stored in the immersion vat 61.SELECTED DRAWING: Figure 4