Designates metallic oxide as the main component on the glass backing material makes the formation accumulate which the manner which and with that coat is done the glass backing material

摘要

PROBLEM TO BE SOLVED: To provide a method for depositing a layer consisting essentially of a metal oxide on a glass base material and to present its use.;SOLUTION: In this method for depositing the layer of consisting essentially of a fluorine-containing metal oxide, particularly the layer 3 of a fluorine-doping type indium oxide or a fluorine-doping type tin oxide F: SnO2 on the glass base material 1 by a chemical vapor deposition method by using at least 2 kinds of precursors containing at least one kind of a metallic precursor and at least one kind of a fluorine precursor, the fluorine precursor contains nitrogen trifluoride NF3.;COPYRIGHT: (C)2000,JPO