Regenerative manner of the plasma central processing unit, the surface of the regenerative mannered null backing material of the component inside the plasma

摘要

A method for regenerating a container for plasma treatment, characterized in that, to a thermally sprayed coating comprising one of alumina, a rare earth metal oxide, a polyimide and polybenzimidazole, which has been deteriorated by the use in plasma, on the surface of a member inside a container for plasma treatment having a substrate and, applied thereon, the thermally sprayed coating, a material being the same as that for the deteriorated sprayed coating is re-sprayed. The method allows a container for plasma treatment having a surface deteriorated by the use in plasma to be generated into the one as good as new.