While the cleaning sealing device and the high purity quartz crucible null

摘要

PROBLEM TO BE SOLVED: To reduce an amount of an impurity metal on the surface of a quartz crucible by sequentially providing a means for injecting detergent onto an internal surface of the crucible, a means for drying the cleaned crucible and a means for sealing an opening of the crucible by a sheet in a clean room.;SOLUTION: A cleaning section A, a drying section B, a sealing section C and a transfer means X are provided in a clean room D to constitute an automatically cleaning and sealing apparatus for a quartz crucible R. The cleaning section A for cleaning an inner peripheral surface and a bottom face of the crucible R which has been transferred by the transfer means X comprises an acid cleaning section A1 and a pure water cleaning section A2. The drying section B includes a heating means such as a heater in a process for drying the crucible R. The sealing section C comprises a means C10 for supplying a sheet for sealing to a sealing position, a means C30 for putting the sheet over the crucible R at the sealing position and a means C40 for fixing the sheet to the crucible R in a process for sealing an opening of the crucible R by the sheet.;COPYRIGHT: (C)2001,JPO