QUARTZ CRUCIBLE PRODUCTION IN MITSUBISHI MATERIALS QUARTZ AKITA PLANT

摘要

Mitsubishi Materials Quartz Corporation (MMQ) was established in 1983 as a production plant of quartz crucibles used for the CZ process in silicon single crystal production. At the early stage in MMQ history, 12 inches diameter quartz crucibles for 4 or 5 inches single crystal were mainly produced, along with the expansion of production equipment, 40 inches diameter quartz crucible, which used for 400 mm diameter single crystal silicon, have been produced in MMQ Akita plant now. And till now some technology were developed to produce higher purity and larger crucibles to meet the request from many silicon manufactures.This paper reports the technology of quartz crucible production and its process in MMQ Akita plant, and describes the required quality and shape characteristics, the method of quality assurance, the development of quartz crucible in the future too.