Scan controller probe, a scanning probe microscope, and a scanning control method of the probe by the scanning controller, measuring method according to the scanning control method

摘要

PROBLEM TO BE SOLVED: To provide a probe scanning control device, scanning probe microscope by the same, probe scanning control method, and measuring method by the scanning control method, capable of detecting a solid-shaped sample where the angle of inclination changes, with fixed resolution in the direction of the shape of the sample.;SOLUTION: Sampling is performed by controlling intervals in such a way that the follow distance of the probe in the direction of the shape of the sample may be constant between sampling points divided at regular intervals in the direction of the shape of the sample.;COPYRIGHT: (C)2002,JPO