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Liquid mixed method and survey instrument of micro inspection tip/chip
Liquid mixed method and survey instrument of micro inspection tip/chip
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机译:微检头/芯片的液体混合方法及测量仪器
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摘要
To make the liquid contact which differs in series, putting the front and back with the air, because inside the mixed passage unidirectionally by the fact that the sending liquid it does, it is possible, to mix the liquid making use of the movement with the shear force of the wall surface of the mixed passage and the liquid and of the air the boundary tension of the boundary liquid mixed method of the micro inspection tip/chip which can mix the liquid which differs efficiently and it is possible to offer the survey instrument.
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