Device for inspecting a micro structure, the substrate holding apparatus and method for inspecting a micro structure

摘要

A device for inspecting a micro structure having a movable portion that is supported by both sides (16a), the main surface (8) wafer in which the microstructure is formed is concave or convex shape having a constant radius of curvature substantially As a shape, and a (9) Top chuck for holding a wafer (8). Further includes a deforming means for changing the radius of curvature of the shape of the major surface of the wafer (8). In particular, deformation means, a temperature control means for deforming by the temperature the shape of the upper surface of the chuck top for placing a substrate (9). A flat top chuck top (9), the constitution may be top for mounting (8) the wafer is sandwiched between the wafer chuck top (8) and (9), a transfer tray having a concave or convex shape.