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PARTICLE INSPECTION AND REMOVAL APPARATUS AND PARTICLE INSPECTION AND REMOVAL PROGRAM
PARTICLE INSPECTION AND REMOVAL APPARATUS AND PARTICLE INSPECTION AND REMOVAL PROGRAM
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机译:颗粒物检查和清除设备以及颗粒物检查和清除程序
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摘要
The present invention is to lessen work burden on a user, to eliminate determination error, to prevent a substrate from being damaged, and to prevent prolonged working time by automatically determining whether or not a particle to be removed is present. A particle inspection and removal apparatus of the present invention includes a particle information acquisition section acquiring particle information on a particle adhering onto a substrate surface, a particle removal section removing the particle adhering onto the substrate surface, a comparison section comparing a threshold set for each of regions of the substrate surface with the particle information on each of the region obtained by the particle information acquisition section, and a particle removal control section controlling the particle removal section to remove the particle on the substrate surface based on a comparison result of the comparison section.
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