A METHOD AND RELATIVE DEVICE FOR THE MANAGEMENT OF TECHNOLOGICAL RECIPE INFORMATION TO AID IN DEFINING PROCESS FLOWS, IN PARTICULAR FOR THE DEVELOPMENT AND PRODUCTION OF MICRO-AND NANOTECHNOLOGY DEVICES IN CLEANROOM LABORATORIES

摘要

There is described a method for managing information to actively support the definition of new process flows, in particular in the field of micro- and nanotechnology devices typically developed in cleanroom laboratories where one or more production batches can be executed according to one reference process flow. With the use of this method it is possible to store information suited to trace the reliability and the evolution of technological recipes used into one or more production batches based on a given reference process flow. Thanks to these storing and tracing capabilities, the method addresses the selection of appropriate and reliable recipes while designing new process flows, thus favoring the definition of highly reliable new processes. The method is general and transparent with respect to different recipe types, recipe structures and technologies.