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FLEXIBLE PIEZORESISTIVE INTERFACIAL SHEAR AND NORMAL FORCE SENSOR AND SENSOR ARRAY
FLEXIBLE PIEZORESISTIVE INTERFACIAL SHEAR AND NORMAL FORCE SENSOR AND SENSOR ARRAY
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机译:灵活的压电电阻界面剪切和法向力传感器及传感器阵列
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摘要
A force sensor includes a polymeric substrate including a cavity with a tilt plane, at least two metal piezoresistors on the tilt plane, and a contact pad connected to the metal piezoresistors. The tilt plane may include a measured interface of from 15° to 75°.
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