Capacitors comprising dielectric regions having first and second oxide material portions of the same chemical compositon but different densities

摘要

A capacitor includes a first capacitor electrode which includes conductive metal. A second capacitor electrode is spaced from the first capacitor electrode. A capacitor dielectric region is received between the first and second capacitor electrodes. Such region comprising a first portion oxide material of a first density over the first capacitor electrode, and a second portion oxide material of a second density received over the first portion. The oxide-comprising material of the first portion and the oxide-comprising material of the second portion are the same in chemical composition and the second density is greater than the first density.