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METHOD FOR DETERMINING A STATEMENT OF A STATE OF A TURBOMOLECULAR PUMP AND A TURBOMOLECULAR PUMP

机译：确定涡轮分子泵和涡轮分子泵的状态的陈述的方法

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摘要

In a method for determining a statement of a state of a turbomolecular pump, and in a turbomolecular pump, a vibration curve is determined with a vibration sensor (10) connected to the turbomolecular pump. The determined vibration curve is transferred to an evaluation device (12), wherein vibration amplitudes are detected by a filter (16) in the evaluation device (12) and then compared to comparative values. If a threshold value is exceeded, a warning signal is transferred to a monitoring system (30) by a remote data transfer device (28). The method allows for online monitoring of turbomolecular pumps.

机译：在用于确定涡轮分子泵的状态的陈述的方法中，并且在涡轮分子泵中，利用连接到涡轮分子泵的振动传感器（ 10 ）来确定振动曲线。所确定的振动曲线被传送到评估设备（ 12 ），其中，振动幅度由评估设备（ 12 中的滤波器（ 16 ）检测。 B>），然后与比较值进行比较。如果超过阈值，警告信号将通过远程数据传输设备（ 28 ）传输到监视系统（ 30 ）。该方法允许在线监测涡轮分子泵。 展开▼

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公开/公告号US2010054957A1

专利类型

公开/公告日2010-03-04

原文格式PDF

申请/专利权人 THOMAS GOETZE;REINER HOELZER;CHRISTIAN HARIG;
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申请/专利号US20070374917

发明设计人 REINER HOELZER;CHRISTIAN HARIG;THOMAS GOETZE;
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申请日2007-06-22

分类号F04D19/04;G01M19/00;

国家 US

入库时间 2022-08-21 18:50:57

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1. 用于确定涡轮分子泵的状态信息的方法和涡轮分子泵 [P] . 中国专利： CN101495760B . 2011.08.10

2. 用于确定涡轮分子泵的状态信息的方法和涡轮分子泵 [P] . 中国专利： CN101495760A . 2009-07-29

3. METHOD FOR DETERMINING A STATEMENT OF A STATE OF A TURBOMOLECULAR PUMP AND A TURBOMOLECULAR PUMP [P] . 欧洲知识产权局专利： EP2044331B1 . 2011-06-15

机译：确定涡轮分子泵和涡轮分子泵的状态的陈述的方法

4. METHOD FOR DETERMINING A STATEMENT OF A STATE OF A TURBOMOLECULAR PUMP AND A TURBOMOLECULAR PUMP [P] . 欧洲知识产权局专利： EP2044331A1 . 2009-04-08

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5. METHOD FOR DETERMINING A STATEMENT OF A STATE OF A TURBOMOLECULAR PUMP AND A TURBOMOLECULAR PUMP [P] . 世界知识产权组织专利： WO2008012150A1 . 2008-01-31

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