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Electrostatic actuator, device comprising such actuators, microsystem comprising such a device and method for making such an actuator
Electrostatic actuator, device comprising such actuators, microsystem comprising such a device and method for making such an actuator
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机译:静电致动器,包括这种致动器的设备,包括这种设备的微系统以及制造这种致动器的方法
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摘要
An electrostatic actuator including: at least one fixed electrode, fixed with respect to a substrate; at least one flexible electrode arranged to face the substrate; a pivot member extending from the flexible electrode, the pivot member being fixed to a face of the flexible electrode facing the fixed electrode, and the pivot member being made from a conducting material; and at least one suspending unit suspending the flexible electrode and holding the flexible electrode at rest at a distance from the substrate, wherein the suspending unit and the pivot member are different.
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