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Method of manufacturing nozzle plate, method of manufacturing liquid ejection head, and matrix structure for manufacturing nozzle plate
Method of manufacturing nozzle plate, method of manufacturing liquid ejection head, and matrix structure for manufacturing nozzle plate
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机译:制造喷嘴板的方法,制造液体喷射头的方法以及用于制造喷嘴板的矩阵结构
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摘要
The method manufactures a nozzle plate, and comprises: a patterned resist formation step of forming a patterned resist on a flat surface of a matrix substrate, the patterned resist having a shape corresponding to a diameter of nozzle holes in a nozzle plate to be formed, the patterned resist having a thickness corresponding to a length of the nozzle holes; a nozzle length regulating member placement step of placing the nozzle length regulating member having a flat surface onto the patterned resist in such a manner that the flat surface of the nozzle length regulating member faces the flat surface of the matrix substrate across the patterned resist; and a nozzle plate formation step of forming the nozzle plate by plating with the patterned resist between the flat surface of the matrix substrate and the flat surface of the nozzle length regulating member.
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