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Method of manufacturing nozzle plate, method of manufacturing liquid ejection head, and matrix structure for manufacturing nozzle plate

机译:制造喷嘴板的方法,制造液体喷射头的方法以及用于制造喷嘴板的矩阵结构

摘要

The method manufactures a nozzle plate, and comprises: a patterned resist formation step of forming a patterned resist on a flat surface of a matrix substrate, the patterned resist having a shape corresponding to a diameter of nozzle holes in a nozzle plate to be formed, the patterned resist having a thickness corresponding to a length of the nozzle holes; a nozzle length regulating member placement step of placing the nozzle length regulating member having a flat surface onto the patterned resist in such a manner that the flat surface of the nozzle length regulating member faces the flat surface of the matrix substrate across the patterned resist; and a nozzle plate formation step of forming the nozzle plate by plating with the patterned resist between the flat surface of the matrix substrate and the flat surface of the nozzle length regulating member.
机译:该方法制造喷嘴板,并且包括:图案化抗蚀剂形成步骤,其在基质基板的平坦表面上形成图案化抗蚀剂,该图案化抗蚀剂具有与要形成的喷嘴板中的喷嘴孔的直径相对应的形状,图案化抗蚀剂的厚度与喷嘴孔的长度相对应;喷嘴长度限制部件配置步骤,将具有平坦表面的喷嘴长度限制部件以使喷嘴长度限制部件的平坦面跨过图案化抗蚀剂而与矩阵基板的平坦面相对的方式配置在图案形成抗蚀剂上。喷嘴板形成工序是在基体基板的平坦面与喷嘴长度限制部件的平坦面之间镀有图案化的抗蚀剂而形成的。

著录项

  • 公开/公告号US7647697B2

    专利类型

  • 公开/公告日2010-01-19

    原文格式PDF

  • 申请/专利权人 TSUTOMU YOKOUCHI;

    申请/专利号US20060510586

  • 发明设计人 TSUTOMU YOKOUCHI;

    申请日2006-08-28

  • 分类号B41J2/16;

  • 国家 US

  • 入库时间 2022-08-21 18:49:57

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