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Solid-state imaging device having on-chip color filter layers and solid-state imaging device manufacturing method of the solid-state imaging device
Solid-state imaging device having on-chip color filter layers and solid-state imaging device manufacturing method of the solid-state imaging device
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机译:具有芯片上滤色器层的固态成像装置以及该固态成像装置的固态成像装置的制造方法
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摘要
A solid-state imaging device 1 includes: a semiconductor substrate 11 on which pixels are placed like a matrix; and each of the pixels having a photoelectric conversion element 13 and a color filter layer 21 which is formed on the photoelectric conversion element 13. The solid-state imaging device 1 includes resin parts 20 which are formed at the boundaries of these photoelectric conversion devices 13 which are adjacent to each other, each of the resin parts 20 having an upward convex shape. Each color filter layer 21 of the device is formed so that the color filter layer covers the area ranging from the summit of a resin part to the summit of an adjacent resin part, and each color filter layer 21 is thinner in the peripheral part than in the center part around the summit.
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