Detector for devices radiating corpuscular radiation, device radiating corpuscular radiation and method for detecting existence of products interaction within the device

摘要

In the present invention, there is disclosed a detector being intended for devices radiating corpuscular radiation and being usable both under ultra-high vacuum conditions and also under pressure above 10e-3 kPa in an examined sample chamber of the corpuscular radiation radiating device. The detector contains a scintillator (3) powered by a high-voltage potential and a light detector (1). The scintillator (3) contains an electrically conductive layer (4) provided in grid or strip shape or an electrically conductive layer (4) permeable for visible light and therefore being capable of detecting both electrons and visible light. The detector is suitable for detecting electrons in ultra-high vacuum and for detecting light at high pressure in the sample chamber (6) because of using different potentials. The device radiating corpuscular radiation, especially screening electron microscope, is provided with the sample chamber (6), in which is variable pressure, an electron optic system for creating a focused electron beam (PE) and said detector. At this method for detection of interaction products existence in the device radiating corpuscular radiation at conditions of varying pressure both light arising in ultra-high vacuum conditions when the products of interaction strike a scintillator (3) and light arising at ambient pressure or low vacuum conditions when the products of interaction interact with gas molecules are detected by the same detector (1) and then evaluated.