PROCESS FOR MECHANICALLY TESTING MEMS DEVICES

摘要

The invention relates to a process for testing MEMS devices by applying thereto some combined mechanical stimuli, such as acceleration, vibrations and shocks, simultaneously on several axes, possibly concomitantly with some special environment conditions - climate stimuli, such as temperature, humid heat etc. or special environments, such as salty atmosphere, dust, radiations etc., corresponding to the purpose aimed at by the users. Some MEMS devices (1) are subjected to a motion characterized by repeated alternating tilts. The strain a MEMS device is subjected to is applied with forces of variable intensities and directions, simultaneously on two axes, in the plane of motion. The frequence of the repeated mechanical stimuli can be constant, variable, e.g. following a certain pattern, or they can be exerted for preset periods of time, and repeated at steady or aleatory intervals.