CMOS IMAGE SENSOR HAVING A SIGNAL PROCESSING BLOCK OF AN MEMS ACCELERATION SENSOR AND MANUFACTURING METHOD THEREOF

摘要

The present invention relates to a CMOS image sensor provided with a signal processing block of an MEMS acceleration sensor, and to a manufacturing method thereof. More particularly, the present invention relates to a CMOS image sensor having a signal processing block of an MEMS acceleration sensor, in which a readout circuit of the MEMS acceleration sensor is arranged in the CMOS image sensor separately from an MEMS element to output signals of the MEMS acceleration sensor and images, and to a manufacturing method thereof.