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SYSTEM AND METHOD FOR THE QUANTITATIVE ANALYSIS OF THE ELEMENTARY COMPOSITION OF MATTER BY LASER-INDUCED PLASMA SPECTROSCOPY (LIBS)

机译:激光诱导等离子体光谱法对物质基本成分进行定量分析的系统和方法

摘要

The present invention relates to a system and to a method for measuring the elementary concentrations of matter from a sample (1) containing a plurality of elements by LIBS analysis. The matter is heated so as to generate a plasma (12) in order to determine the chemical composition thereof from the spectral analysis of the radiation thereof. Spectral rays of interest are identified (20) among those emitted by the constituents of each element in the composition of the sample (1). The intensities of the identified spectral rays (21) are measured. The chemical composition of the plasma is then calculated (27) based on an estimation of the temperature (T), of the electronic density (ne), and of the relative values of the elementary concentrations (Cx). According to the invention, the absorption coefficient based on the wavelength is calculated (28) for the spectral areas of the rays of interest. Based on an estimation of the plasma width (L), the spectral luminance of the plasma is calculated (29) for the same spectral areas, and a comparison is made (30) between the intensity and the shape of the spectrum thus calculated and those of the measured spectrum. The calculations (27, 28, 29) and the comparison (30) are repeated in an iterative manner in order to adjust the temperature, the electronic density and the relative values of the elementary concentrations and of the plasma width. This iteration is repeated until a difference between the intensity and the shape of the calculated spectrum and those of the measured spectrum which is lower than or equal to a predetermined threshold value in terms of absolute value is obtained (31).
机译:本发明涉及用于通过LIBS分析来测量来自包含多种元素的样品(1)中物质的元素浓度的系统和方法。加热该物质以产生等离子体(12),以便根据其辐射的光谱分析确定其化学组成。在由样品(1)的成分中的每个元素的成分发出的那些中识别出感兴趣的光谱射线(20)。测量所识别的光谱射线(21)的强度。然后基于温度(T),电子密度(ne)和元素浓度的相对值(Cx)的估计来计算(27)等离子体的化学组成。根据本发明,针对感兴趣的射线的光谱区域计算基于波长的吸收系数(28)。基于对等离子体宽度(L)的估计,针对相同光谱区域计算(29)等离子体的光谱亮度,并且在由此计算的光谱的强度和形状与那些光谱强度和形状之间进行比较(30)。被测光谱的为了调整温度,电子密度以及元素浓度和等离子体宽度的相对值,以迭代的方式重复计算(27、28、29)和比较(30)。重复该迭代,直到获得所计算的光谱的强度和形状与所测量的光谱的强度和形状之间的差,该差与绝对值相比小于或等于预定阈值(31)。

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