METHOD FOR PRODUCING NITROGEN TRIFLUORIDE OR CHLORINE-FLUORIDE COMPOUND

摘要

The method for producing nitrogen trifluoride or chlorine fluoride compound is characterized by possessing a process whereby a reaction product gas containing NF3, ClF, and ClF3 is obtained by mixing a gas containing nitrogen chlorofluoride represented by general formula [NFxCl3–x (X = 1 or 2)] and a gas containing HF or F2 and introducing this to a reactor as a starting material gas, and by the concentration of nitrogen chlorofluoride in the starting material gas being 1‑15% by volume. This method makes it possible to improve nitrogen trifluoride and chlorine fluoride compound productivity, and to improve the safety during production.