Capacitive micromachined ultrasonic transducer and its fabrication method

摘要

The invention relates to an electro-acoustic transducer (8) comprising a substrate (1) of a substrate material, a cavity (3) and a membrane (5) extending over at least a portion of the cavity. The cavity is arranged in the substrate material and the membrane is supported above the cavity by the substrate material. The invention further relates to a method of fabrication such an electro-acoustic transducer.