MULTIPLE CANTILEVER MEMS SENSOR AND A MANUFACTURING METHOD THEREOF, AND A SOUND SOURCE LOCATION PREDICTING APPARATUS AND METHOD USING THE MULTIPLE CANTILEVER MEMS SENSOR FOR MASS PRODUCTION OF ROBOT

摘要

PURPOSE: A multiple cantilever MEMS sensor and a manufacturing method thereof, and a sound source location predicting apparatus and method using the multiple cantilever MEMS sensor are provided to improve processing speed and reduce manufacturing cost in mass production.;CONSTITUTION: A multiple cantilever MEMS sensor comprises multiple cantilevers(100a~100h) which are free on one end and fixed on the other, and terminals(Ta1~Th2). The free ends of the cantilevers are different in length. The fixed ends of the cantilevers are equipped with a pressure resistance(20) and a detector(30). The terminals sense the signal generated by the pressure resistance.;COPYRIGHT KIPO 2010