MICRO-HEATER, MICRO-HEATER ARRAY, A METHOD FOR MANUFACTURING THE SAME AND AN ELECTRONIC DEVICE USING THE SAME, CAPABLE OF BEING APPLIED TO VARIOUS APPARATUS

摘要

PURPOSE: A micro-heater, micro-heater array, a method for manufacturing the same and an electronic device using the same are provided to prevent a micro-heater from being damaged even if heating and cooling is repeated.;CONSTITUTION: A micro heater(50) includes a metal Line, a supporting part, and a deformation part. The metal line(20) is separated from the substrate. The supporting part(40) is positioned between a substrate and the metal Line, and the supporting part fixes the metal line on a substrate under the metal Line. The deformation part(25) is formed at least one portion of the metal line.;COPYRIGHT KIPO 2010