Micro-heaters, micro-heater arrays, methods for manufacturing the same and electronic devices using the same

摘要

Example embodiments provide micro-heaters including a heating section, a plurality of connecting sections, and a plurality of support structures. The heating section is on the substrate, separated from the substrate and extended in a longitudinal direction. The plurality of connecting sections are arranged at a distance from each other in the longitudinal direction of the heating section, and extended from two sides of the heating section in a perpendicular direction with respect to the longitudinal direction of the heating section. The plurality of support structures are formed between the substrate and the plurality of connecting sections, so as to support the heating section and the plurality of connecting sections from underneath the plurality of connecting sections. Therefore, since the heating section and the plurality of support structures are separated from each other by the plurality of connecting sections, temperature distribution on the heating section is not influenced by the shape of each one of the plurality of support structures. Consequently, temperature distribution on the heating section may be more uniform and power consumption of the micro-heater may decrease.