nanospheres form of mold for nanoimprint template fabrication method , a single-layer polymeric nanospheres pattern forming method using the same, and application method using the monolayer nanospheres pattern

摘要

A method for manufacturing nanosphere-typed template for nanoimprint and a single-layer nanosphere pattern using the same are provided to enable a single-layer nanosphere to be formed on a substrate. A method for manufacturing nanosphere-typed template for nanoimprint comprises the following steps of: laminating nanosphere layers(210) on a substrate(200); transferring the outer layer of the nanosphere layers to a polymer layer(220) for template; and eliminating the nanosphere from the polymer layer for template in order to form a nanosphere-typed(230) template. The polymer layer for template represents one or more compounds selected from the group consisting of polyvinyl chloride(PVC), polycarbonate(PC) and polymethyl methacrylate.