method for producing a stamp method and the electron-emitting device using a stamp that is used in the manufacture of the electron-emitting device

摘要

PURPOSE: A manufacturing method of a stamp for an electron emitting element and a manufacturing method of the electron emitting element using the stamp are provided to form a pattern on a desired part in a method imprinting the stamp on the substrate. CONSTITUTION: A manufacturing method of a stamp for an electron emitting element and a manufacturing method of the electron emitting element using the stamp are comprised of the following step. The stamp used in the process prepares as the soft PDMS mold which has the hydrophobic surface. The mold which has the periodic streak pattern of a several micro meter thicknesses under the light lithography method is formed. The hardener 5 to 15 Wt% and the silicon carbon elastomeric 85 to 95Wt% are mixed to the prepared mold. The mixed result is dried in the vacuum dryer for the half an hour to remove the air bubble of mixture. Moreover, the mixed result is dried for 40 to 80 minutes at the temperature of 40 to 80. The PDMS stamp(10) in which the streak pattern is formed is manufactured by separating the hardened PDMS stamp from the mold. The dried mixture is separated from the mold.