METHOD FOR PRODUCING POROUS SILICON ARRAYS ON SINGLE SUBSTRATE USING SUBSTRATE RECYCLE TECHNIQUE

摘要

PURPOSE: A method for producing porous silicon array is provided to reduce material consumption and apply to a sensor and drug delivery system.;CONSTITUTION: A method for producing porous silicon array comprising two or more components of same or different preparation condition comprises: a step of forming porous silicon layer through anodized oxidation; a step of removing porous silicon layer from a substrate through electrolytic polishing, NaOH solution etching or combination of electrolytic polishing and NaOH solution etching; and a step of obtaining porous silicon layer on recycled substrate again through anodized oxidation.;COPYRIGHT KIPO 2010